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Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates

2008; American Institute of Physics; Volume: 92; Issue: 6 Linguagem: Inglês

10.1063/1.2870099

1520-8842

Shigehito Miki, Mikio Fujiwara, Masahide Sasaki, Burm Baek, Aaron Miller, Robert H. Hadfield, Sae Woo Nam, Zhen Wang,

Photonic and Optical Devices

We report on the performance of large area NbN nanowire superconducting single-photon detectors (SSPDs). 20×20μm2 area SSPDs with 80 and 100nm linewidths and 50% fill factor were fabricated in 4-nm-thick NbN films grown on single-crystal MgO substrates. The high quality of the devices was verified by electrical and optical testing and compares favorably to measurements of 10×10μm2 area SSPDs. Measurements of kinetic inductance versus bias current indicate that the constriction density is low. The fiber-coupled detection efficiency of the devices was 0.4%–3.5% at 100Hz dark count rate.