Strain in pseudomorphic films grown on arbitrarily oriented substrates
1994; American Institute of Physics; Volume: 65; Issue: 22 Linguagem: Inglês
10.1063/1.112564
ISSN1520-8842
AutoresKai Yang, T. Anan, L. J. Schowalter,
Tópico(s)Copper Interconnects and Reliability
ResumoThe constraint equations for the unit translation vectors of a pseudomorphic film grown on an arbitrarily oriented substrate are correctly given for the first time. The strain in a pseudomorphic film grown on an arbitrarily oriented substrate is calculated via energy minimization under the pseudomorphic constraint. The strain tensor and the rotation tensor are concisely expressed in terms of lattice mismatch, elastic constants, and the substrate orientation vector. An expression is given for the piezoelectrically generated electric field in a pseudomorphic zinc blende film.
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