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Patterning Graphene with Zigzag Edges by Self‐Aligned Anisotropic Etching

2011; Volume: 23; Issue: 27 Linguagem: Inglês

10.1002/adma.201100633

1521-4095

Zhiwen Shi, Rong Yang, Lianchang Zhang, Yi Wang, Donghua Liu, Dongxia Shi, Enge Wang, Guangyu Zhang,

Metamaterials and Metasurfaces Applications

Advanced MaterialsVolume 23, Issue 27 p. 3061-3065 Communication Patterning Graphene with Zigzag Edges by Self-Aligned Anisotropic Etching Zhiwen Shi, Zhiwen Shi Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorRong Yang, Rong Yang Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorLianchang Zhang, Lianchang Zhang Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorYi Wang, Yi Wang Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorDonghua Liu, Donghua Liu Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorDongxia Shi, Dongxia Shi Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorEnge Wang, Enge Wang International Centre of Quantum Materials, School of Physics, Peking University, Beijing 100871, P. R. ChinaSearch for more papers by this authorGuangyu Zhang, Corresponding Author Guangyu Zhang [email protected] Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaNanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. China.Search for more papers by this author Zhiwen Shi, Zhiwen Shi Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorRong Yang, Rong Yang Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorLianchang Zhang, Lianchang Zhang Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorYi Wang, Yi Wang Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorDonghua Liu, Donghua Liu Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorDongxia Shi, Dongxia Shi Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaSearch for more papers by this authorEnge Wang, Enge Wang International Centre of Quantum Materials, School of Physics, Peking University, Beijing 100871, P. R. ChinaSearch for more papers by this authorGuangyu Zhang, Corresponding Author Guangyu Zhang [email protected] Nanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaNanoscale Physics and Device Lab, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, P. R. China.Search for more papers by this author First published: 19 May 2011 https://doi.org/10.1002/adma.201100633Citations: 164Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Graphical Abstract A top-down approach for controlled tailoring of graphene nanostructures with zigzag edges is presented. It consists of two key steps: artificial defect patterning and hydrogen-plasma etching. With this approach, various graphene nanostructures with sub-10 nm features and identical zigzag edges are reliably achieved. 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