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SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

2007; Elsevier BV; Volume: 124; Issue: 2 Linguagem: Inglês

10.1016/j.snb.2007.01.004

1873-3077

Jan Spannhake, Andreas Helwig, Gerhard Müller, G. Faglia, Giorgio Sberveglieri, Theodor Doll, Thomas A. Wassner, Martin Eickhoff,

Acoustic Wave Resonator Technologies

MEMS micro heater devices capable of long-term operation at temperatures up to 1000 °C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film.