Portal de Periódicos da CAPES

Focused ion-beam crater arrays for induced nucleation of diamond film

1989; AIP Publishing; Volume: 7; Issue: 6 Linguagem: Inglês

10.1116/1.584653

2327-9877

A. R. Kirkpatrick, Bill Ward, N. P. Economou,

Metal and Thin Film Mechanics

Diamond thin-films on nondiamond substrates characteristically exhibit a highly disordered polycrystalline microstructure and poor surface morphology. A major factor involved in this unsatisfactory growth behavior is a very-low density-of-nucleation on most surfaces. It is feasible that ion milling by a focused ion-beam can be utilized to introduce precise arrays of effective nucleation sites for diamond-film deposition. Possibilities for improved diamond-film microstructure and morphology are expected to result.