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IC failure analysis: Techniques and tools for quality and reliability improvement

1995; Elsevier BV; Volume: 35; Issue: 3 Linguagem: Inglês

10.1016/0026-2714(95)93069-m

1872-941X

J.M. Soden, Richard E. Anderson,

Semiconductor materials and devices

Failure analysis is an important function for integrated circuit manufacturing. It provides information necessary for technology advacement and for corrective action to improve quality and reliability. In this article the role of failure analysis is discussed, common and new techniques and tools are reviewed, and oppurtunities for the future are considered.