Correlation of Raman spectra with carbon ion energy for amorphous diamond-like films produced with a mass-separated ion beam
1996; Elsevier BV; Volume: 217; Issue: 6 Linguagem: Inglês
10.1016/0375-9601(96)00346-5
ISSN1873-2429
AutoresLeonid Khriachtchev, Marko Hakovirta, Reijo Lappalainen, Markku Räsänen,
Tópico(s)Glass properties and applications
ResumoThe Raman spectra of hydrogen-free amorphous diamond-like films prepared using a mass-separated carbon ion beam and different deposition energies are investigated. The correlation between the numerical parameters of the Raman spectra in the 100 to 2100 cm−1 range and the deposition energy, and consequently the sp3 fraction, is demonstrated.
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