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Inductively coupled plasma etching for large format HgCdTe focal plane array fabrication

2005; Springer Science+Business Media; Volume: 34; Issue: 6 Linguagem: Inglês

10.1007/s11664-005-0014-8

1543-186X

E. P. Smith, G. M. Venzor, Michael Newton, M. V. Liguori, J. K. Gleason, R. E. Bornfreund, S. M. Johnson, J. D. Benson, A. J. Stoltz, J. B. Varesi, J. H. Dinan, W. A. Radford,

Electronic and Structural Properties of Oxides