AES and XPS depth profiling certified reference material
1984; Wiley; Volume: 6; Issue: 2 Linguagem: Inglês
10.1002/sia.740060211
ISSN1096-9918
AutoresC. P. Hunt, M. T. Anthony, M. P. Seah,
Tópico(s)Semiconductor materials and devices
ResumoSurface and Interface AnalysisVolume 6, Issue 2 p. 92-93 Short Communication AES and XPS depth profiling certified reference material C. P. Hunt, C. P. Hunt Division of Materials Applications, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKSearch for more papers by this authorM. T. Anthony, M. T. Anthony Division of Materials Applications, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKSearch for more papers by this authorM. P. Seah, M. P. Seah Division of Materials Applications, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKSearch for more papers by this author C. P. Hunt, C. P. Hunt Division of Materials Applications, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKSearch for more papers by this authorM. T. Anthony, M. T. Anthony Division of Materials Applications, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKSearch for more papers by this authorM. P. Seah, M. P. Seah Division of Materials Applications, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKSearch for more papers by this author First published: April 1984 https://doi.org/10.1002/sia.740060211Citations: 28AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat No abstract is available for this article. References 1 C. P. Hunt and M. P. Seah Surf Interface Anal. 5, 199 (1983). 2 M. P. Seah, H. J. Mathieu and C. P. Hunt, Surf. Sci., in press. Citing Literature Volume6, Issue2April 1984Pages 92-93 ReferencesRelatedInformation
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