Portal de Periódicos da CAPES

Compression phases in copper/oxygen coadsorption layers on a Ru(0001) surface

1993; Elsevier BV; Volume: 287-288; Linguagem: Inglês

10.1016/0039-6028(93)91113-4

1879-2758

Mathias V. Schmidt, H. Wolter, M. Schick, K. Kalki, K. Wandelt,

Copper Interconnects and Reliability

Abstract The adsorption of Cu on an oxygen-precovered Ru(0001) surface and the interaction within the O-Cu coadsorption layer have been studied at substrate temperatures of 640 and 400 K using dynamical work function change measurements with a Kelvin-probe, LEED observations as well as Cu thermal desorption spectra. The results are consistently explained in terms of a “compression model” according to which adsorbing Cu compresses any oxygen surface structure which is less dense than the p(2 × 1) phase, e.g. the p(2 × 2) structure, into a p(2 × 1) structure.