Reaction of trimethylgallium with tin, silicon, germanium and arsenic films
1974; Elsevier BV; Volume: 71; Issue: 2 Linguagem: Inglês
10.1016/s0022-328x(00)93126-7
ISSN1872-8561
Autores Tópico(s)Semiconductor materials and interfaces
ResumoThe transfer of methyl groups from (CH3)3Ga to tin, silicon and germanium films has been observed at 190, 230 and 285°C forming (CH3)4Sn, (CH3)6Si2, (CH3)3SiH and (CH3)4Ge, respectively.
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