Fine tuning of quantum-dot pillar microcavities by focused ion beam milling
2008; American Institute of Physics; Volume: 92; Issue: 1 Linguagem: Inglês
10.1063/1.2827574
ISSN1520-8842
AutoresH. Lohmeyer, J. Kalden, K. Sebald, C. Kruse, D. Hommel, J. Gutowski,
Tópico(s)Photonic and Optical Devices
ResumoThe targeted fine tuning of semiconductor pillar microcavities by postfabrication focused ion beam milling is described for the example of ZnSe-based structures with CdSe quantum dots embedded. Using the sensitive dependence of the spectral position of the modes on the cavity diameter, the modes are precisely blueshifted by a reduction of the pillar diameter with an accuracy below 100nm. The microcavities can be tuned to match the emission energy of individual quantum dots at a certain temperature, which results in a strongly enhanced luminescence intensity of the dots.
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