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Fabrication of NMR — Microsensors for nanoliter sample volumes

2000; Elsevier BV; Volume: 53; Issue: 1-4 Linguagem: Inglês

10.1016/s0167-9317(00)00368-3

1873-5568

Jörn Dechow, A. Forchel, Titus Lanz, Axel Haase,

Molecular Junctions and Nanostructures

Abstract The fabrication of micro-sensors for NMR-spectroscopy on both glass and GaAs is presented. Planar coils with inner diameter from 50 μm to 400 μm including a coplanar wave-guide leading to the bonding pads were combined with a chamber for liquid samples of 200–500 μm diameter on the backside of the substrate. The microcoil served as a receiver in a1H-NMR experiment at 11T (500 MHz). In initial experiments, the spectrum of 60 nl-volumes of pure silicone-oil were detected by the microcoil.