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Advances In Focused-Ion-Beam Repair Techniques

1987; SPIE; Volume: 0773; Linguagem: Inglês

10.1117/12.940372

1996-756X

N. P. Economou, David C. Shaver, Bill Ward,

Ion-surface interactions and analysis

The use of focused-ion-beam (FIB) technology for the repair of masks and for the modification of integrated circuits is discussed. The processes required for these two applications are similar and can thus be implemented by similar systems. Focused-ion-beam sputtering and focused-ion-beam induced deposition results are presented which show the usefulness of FIB techniques for repair applications.