2-4 GHz monolithic lateral p-i-n photodetector and MESFET amplifier on GaAs-on-Si
1990; IEEE Microwave Theory and Techniques Society; Volume: 38; Issue: 9 Linguagem: Inglês
10.1109/22.58643
ISSN1557-9670
AutoresS.N. Subbarao, D. Bechtle, R. Menna, J.C. Connolly, R.L. Camisa, S.Y. Narayan,
Tópico(s)GaN-based semiconductor devices and materials
ResumoThe design, fabrication, and evaluation of broadband lateral p-i-n photodetectors monolithically integrated with multistage MESFET amplifiers on GaAs-on-Si are described. Unique features of this approach are that (a) the lateral p-i-n structure is compatible with monolithic microwave integrated circuit (MMIC) technology and (b) the p-i-n detector is fabricated directly on the GaAs buffer layer without p/sup +/ and n/sup +/ implants, thus resulting in a simplified fabrication process. The operation of the circuit is compared to that of a similar circuit fabricated on a GaAs substrate. A quantum efficiency exceeding 60% has been measured for the p-i-n detectors. The 2- to 4-GHz frequency responses of one- and two-stage p-i-n/FET preamplifiers are presented. The response varies +or-3 dB over the frequency band. >
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