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Tuning photonic nanocavities by atomic force microscope nano-oxidation

2006; American Institute of Physics; Volume: 89; Issue: 4 Linguagem: Inglês

10.1063/1.2236954

1520-8842

K. Hennessy, C. Högerle, Evelyn L. Hu, A. Badolato, Ataç İmamoğlu,

Plasmonic and Surface Plasmon Research

The authors demonstrate a technique to achieve high-precision tuning of photonic crystal nanocavities by atomic force microscope nano-oxidation of the cavity surface. Relative tuning between two nanocavity modes is achieved though careful choice of the oxide pattern, allowing them to restore the spectral degeneracy conditions necessary to create polarization-entangled quantum states. Tuning steps less than the linewidth (1Å) of the high quality factor modes are obtained, allowing for virtually continuous tuning ability.