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High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

2009; Optica Publishing Group; Volume: 17; Issue: 17 Linguagem: Inglês

10.1364/oe.17.014543

1094-4087

Ehsan Shah Hosseini, Siva Yegnanarayanan, Amir H. Atabaki, Mohammad Soltani, Ali Adibi,

Mechanical and Optical Resonators

High quality factor (Q ≈ 3.4 × 10 6 ) microdisk resonators are demonstrated in a Si 3 N 4 on SiO 2 platform at 652-660 nm with integrated in-plane coupling waveguides.Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si 3 N 4 layer at the air-substrate interface to improve the coupling.