A high-performance scintillator-silicon-well X-ray microdetector based on DRIE techniques
2001; Elsevier BV; Volume: 92; Issue: 1-3 Linguagem: Inglês
10.1016/s0924-4247(01)00564-7
ISSN1873-3069
Autores Tópico(s)Particle Detector Development and Performance
ResumoThis paper proposes an X-ray detector based on an array of scintillator crystals, CsI:Tl, encapsulated in a well that is etched into a silicon substrate by deep reactive ion etching.The X-ray energy is ®rst converted to visible light which is detected by a photodetector in the well bottom.DRIE techniques are used to achieve perfect vertical side-walls 515 mm deep, 100 mm pixel square size and to maximize the ®ll factor.The inner walls of the well that are coated with aluminum for improving the number of photons which arrives to the detector and for reducing cross-talk between adjacent wells.Simulations and modeling show an improvement of approximately 26% in the detection ef®ciency using an aluminum layer.
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