Portal de Periódicos da CAPES

Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography

2005; American Institute of Physics; Volume: 23; Issue: 6 Linguagem: Inglês

10.1116/1.2091089

1520-8567

Brian Bilenberg, Mikkel Fougt Hansen, D. M. Johansen, Veysel Özkapici, Claus Jeppesen, Péter Szabó, I. Obieta, O. Arroyo, Jonas O. Tegenfeldt, Anders Kristensen,

Nanofabrication and Lithography Techniques

We present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsystems by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements. These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.