Growth of boron whiskers and ribbons in a low-pressure B2H6 + He + H2 plasma
1990; Elsevier BV; Volume: 102; Issue: 4 Linguagem: Inglês
10.1016/0022-0248(90)90858-i
ISSN1873-5002
AutoresShojiro Komatsu, Yusuke Moriyoshi,
Tópico(s)Superconductivity in MgB2 and Alloys
ResumoThe relationship between the growth conditions and morphological and structural characteristics of boron whiskers grown in plasma enhanced chemical vapor deposition from B2H6 + He + H2 was investigated for the first time. The conditions were as follows: plasma power was 2 kW, pressure was 200 Pa, total gas flow rate was 100 SCCM, substrate temperature ranged from 700 to 880°C, diborance concentration ranged from 0.25 to 1.5 vol%, and hydrogen concentration ranged from 5 to 30 vol%. The whisker growth was preferred with the increased Ts, which accompanied preferred orientation of 〈110〉 to the surface in a hexagonal assignment. The effect of hydrogen or diborane concentration on the whisker growth was prominent, but all whisker samples showed the 〈100〉 preferred orientation.
Referência(s)