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Helium ion microscope: A new tool for nanoscale microscopy and metrology

2006; American Institute of Physics; Volume: 24; Issue: 6 Linguagem: Inglês

10.1116/1.2357967

1520-8567

Bill Ward, John Notte, N. P. Economou,

Advanced Electron Microscopy Techniques and Applications

ALIS Corporation has developed a new helium ion microscope which has many advantages over both traditional scanning electron microscopes (SEMs) and focused ion beams (FIBs). This new technology is expected to produce an ultimate focused spot size of 0.25nm. This high resolution is attributed to the high source brightness (B>4×109A∕cm2sr), low energy spread (ΔE∕E∼2×10−5), and small diffraction effects (λ∼80fm). The interaction of helium ions with matter offers several valuable contrast mechanisms and a surface interaction volume which is much smaller than a SEM or conventional FIB.