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Tunable Surface Acoustic Wave Filter Using Integrated Micro-Electro-Mechanical-System Based Varactors Made of Electroplated Gold

2013; Institute of Physics; Volume: 52; Issue: 7S Linguagem: Inglês

10.7567/jjap.52.07hd13

1347-4065

Akira Konno, Hideki Hirano, Masahiro Inaba, K. Hashimoto, Masayoshi Esashi, Shuji Tanaka,

Ferroelectric and Piezoelectric Materials

This paper describes the fabrication and preliminary evaluation of a 200 Ω terminated, 1 GHz tunable surface acoustic wave (SAW) filter with electrostatic micro-electro-mechanical-system (MEMS) varactors. The tunable filter was constructed on a 15° Y LiNbO 3 substrate to use Love wave with an electromechanical coupling coefficient as high as 25%. The bridge structure of the MEMS varactor was fabricated by Au electroplating on a sacrificial photoresist, which was finally removed by either O 2 plasma ashing or O 3 water etching. The measured center frequency was 1.07 GHz, and the bandwidth was 171 MHz, i.e., 16% in relative bandwidth. The MEMS varactor, which was connected to a series SAW resonator in parallel, pulled in by an actuation voltage of 150 V DC, and the right passband edge moved to lower frequency side by 15 MHz.