Optical behavior of sputter-deposited platinum-oxide films
1985; American Institute of Physics; Volume: 58; Issue: 8 Linguagem: Inglês
10.1063/1.335823
ISSN1520-8850
Autores Tópico(s)Surface Roughness and Optical Measurements
ResumoA series of platinum-oxygen alloys were grown by sputter deposition using a platinum target and rf-excited, oxygen-bearing discharges. The films were deposited on water-cooled single-crystal silicon and glass substrates. Optical behavior in the near-ultraviolet–visible–near-infrared region was studied by spectrophotometry. Changes in reflection and transmission were correlated with changes in film chemistry and structure. The absorption coefficient and two-infrared optical transitions across the band gap were determined for a semiconducting Pt-oxide phase, identified by x-ray photoelectron spectroscopy as α-PtO2. These transitions occur at 1.30 eV (0.95 μm) and 1.47 eV (0.84 μm).
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