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Reactive sputtering of molybdenum-oxide gradient-index filters

1991; American Institute of Physics; Volume: 9; Issue: 3 Linguagem: Inglês

10.1116/1.577599

1520-8559

Alan F. Jankowski, L. R. Schrawyer, P.L. Perry,

Acoustic Wave Resonator Technologies

Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon–oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselected stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters.