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Resonance acoustic microbalance with naked-embedded quartz (RAMNE-Q) biosensor fabricated by microelectromechanical-system process

2012; Elsevier BV; Volume: 33; Issue: 1 Linguagem: Inglês

10.1016/j.bios.2011.12.047

1873-4235

Fumihito Kato, Hirotsugu Ogi, Taiji Yanagida, Shintaro Nishikawa, Masahiko Hirao, Masayoshi Nishiyama,

Mechanical and Optical Resonators

A resonance acoustic microbalance with a naked-embedded quartz (RAMNE-Q) is realized by a microfabrication method, aiming at broader applications of quartzcrystal microbalance (QCM) biosensors.The RAMNE-Q biosensor consists of three layers; a silicon layer with an engraved microchannel and sandwiching glass layers.The naked AT-cut quartz resonator of 9.3 or 28.5 µm thick is located in the microchannel and supported by the silicon micropillors and semicircular walls without fixing, and it is encapsulated by the rigid body.Cupper antennas are used for generating and receiving electromagnetic fields to excite and detect the shear vibration of the quartz oscillator during the solution flow, thereby achieving the noncontact measurement of the resonance frequency.Because of the isolated resonator, the Q