Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications
2014; Optica Publishing Group; Volume: 22; Issue: 11 Linguagem: Inglês
10.1364/oe.22.013102
ISSN1094-4087
AutoresRicardo M. André, Simon Pevec, Martin Becker, Jan Dellith, Manfred Rothhardt, Manuel B. Marques, Denis Đonlagić, Hartmut Bartelt, Orlando Frazão,
Tópico(s)Mechanical and Optical Resonators
ResumoFocused ion beam technology is combined with chemical etching of specifically designed fibers to create Fabry-Perot interferometers. Hydrofluoric acid is used to etch special fibers and create microwires with diameters of 15 μm. These microwires are then milled with a focused ion beam to create two different structures: an indented Fabry-Perot structure and a cantilever Fabry-Perot structure that are characterized in terms of temperature. The cantilever structure is also sensitive to vibrations and is capable of measuring frequencies in the range 1 Hz - 40 kHz.
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