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Artigo Revisado por pares
BIBTEX RIS

Coating characteristics and tribological properties of sputter-deposited MoS2/metal composite coatings deposited by closed field unbalanced magnetron sputter ion plating

2000; Elsevier BV; Volume: 127; Issue: 1 Linguagem: Inglês

10.1016/s0257-8972(00)00538-7

ISSN

1879-3347

Autores

Nathalie Renevier, V.C Fox, D.G. Teer, J. Hampshire,

Tópico(s)

Copper Interconnects and Reliability

Referência(s)
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Surface and Coatings Technology
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