Advances in Scanning Force Microscopy for Dimensional Metrology
2006; Elsevier BV; Volume: 55; Issue: 2 Linguagem: Inglês
10.1016/j.cirp.2006.10.010
ISSN1726-0604
AutoresHans‐Ulrich Danzebrink, Ludger Koenders, Günter Wilkening, Andrew Yacoot, H. Kunzmann,
Tópico(s)Advanced Surface Polishing Techniques
ResumoThis paper presents the state of the art in scanning force microscopy for dimensional metrology. A detailed description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to improve calibration procedures, traceability, reduce measurement uncertainty, ensure consistancy of measurement and broaden the range of applications are described.
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