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BIBTEX RIS

Porous silicon layers used for gas sensor applications

1997; Elsevier BV; Volume: 297; Issue: 1-2 Linguagem: Inglês

10.1016/s0040-6090(96)09437-0

ISSN

1879-2731

Autores

A. Foucaran, F. Pascal‐Delannoy, Alain Giani, A. Sackda, P. Combette, A. Boyer,

Tópico(s)

Semiconductor materials and devices

Resumo

In this communication we report on the elaboration of porous silicon layers for gas sensor applications. We describe our test system for gas sensors, and we investigate the electric characteristics of porous silicon layers (p type) under different gases and levels of humidity. © 1997 Elsevier Science S.A.

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