Portal de Periódicos da CAPES

Electro–Mechano–Fluidic Modeling of Microsystems Using Finite Elements

2012; IEEE Magnetics Society; Volume: 48; Issue: 2 Linguagem: Inglês

10.1109/tmag.2011.2173663

1941-0069

Véronique Rochus, Stefanie Gutschmidt, Alberto Cardona, Christophe Geuzaine,

Acoustic Wave Resonator Technologies

Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing micro-systems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.