Anodic oxide films on tungsten—II. The morphology and dissolution of the films
1980; Elsevier BV; Volume: 20; Issue: 8-9 Linguagem: Inglês
10.1016/0010-938x(80)90086-4
ISSN1879-0496
AutoresAgatino Di Paola, F. Di Quarto, Carmelo Sunseri,
Tópico(s)Semiconductor materials and devices
ResumoScanning electron microscopy was used to investigate the morphology of anodic oxide films on tungsten, obtained in various conditions of anodization. Studies were made of the growth of porous films, whose thickness increases with time and depends upon the current density. Temperature and electrolyte composition influence the film morphology. Gravimetric measurements of film dissolution at 70°C show that after a transient time, the rate of metal dissolution and that of film formation coincide. The porous films thicken because tungsten dissolves as WO22+ and precipitates as WO3.H2O.
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