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Structural and optical properties of ZnO:Mg thin films grown under different oxygen partial pressures

2009; Elsevier BV; Volume: 42; Issue: 5 Linguagem: Inglês

10.1016/j.physe.2009.12.005

1873-1759

Haixia Chen, Jijun Ding, S.Y. Ma,

Copper-based nanomaterials and applications

Pure and Mg-doped zinc oxide (ZnO:Mg) films were deposited using RF reactive magnetron sputtering at different oxygen partial pressures. The microstructures and optical properties in doped ZnO films were systematically investigated by X-ray diffraction (XRD), scanning electronic microscopy (SEM) and fluorescence spectrophotometer. The results indicated that ZnO grain orientation behavior was significantly affected by Mg-doping. And the ZnO:Mg film prepared at 15:10 had the best crystal quality among all ZnO:Mg films. The photoluminescence (PL) measurements at room temperature revealed a violet, two blue and a green emission. The origin of these emissions was discussed. It was also demonstrated that the optical band edge shifted to a shorter wavelength first as Mg was incorporated, and then to a longer wavelength with the increasing of oxygen partial pressures.