β -phase tungsten nanorod formation by oblique-angle sputter deposition
2003; American Institute of Physics; Volume: 83; Issue: 15 Linguagem: Inglês
10.1063/1.1618944
ISSN1520-8842
AutoresTansel Karabacak, Anupama Mallikarjunan, J. P. Singh, Dexian Ye, G.-C. Wang, Toh‐Ming Lu,
Tópico(s)Surface and Thin Film Phenomena
ResumoWe report the creation of an unusual simple cubic β-phase W(100) nanorods with a pyramidal tip having four (110) facets using an oblique-angle sputter deposition technique with substrate rotation (also known as glancing-angle deposition). During the oblique-angle deposition, both β-phase W(100) and α-phase W(110) islands exist at the initial stages of growth. The β-phase W(100) islands grow taller due to the lower adatom mobility on these islands. The taller islands survive in the competition and form isolated nanorods in the later stages of growth. This is in contrast to the sputter deposition at normal incidence, where only the thermodynamically stable bcc α-phase W(110) polycrystalline films were formed when the film grows to a certain thickness.
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