The fabrication of GaN‐based optical cavity mirrors by focused ion beam milling
2003; Wiley; Issue: 7 Linguagem: Inglês
10.1002/pssc.200303482
ISSN1862-6351
AutoresQian Ren, Bei Zhang, Jun Xu, Yan Jin, Zhi Jian Yang, Xiao Hu, Zhi Xin Qin, Zhi Zhong Chen, Xiao Min Ding, Yu Tong, Zhen Sheng Zhang, Guo Yi Zhang, Da Yu, Zi Zhao Gan,
Tópico(s)Advanced Surface Polishing Techniques
Resumophysica status solidi (c)Volume 0, Issue 7 p. 2300-2303 Original Paper The fabrication of GaN-based optical cavity mirrors by focused ion beam milling Qian Ren, Qian Ren School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorBei Zhang, Corresponding Author Bei Zhang beiz@water.pku.edu.cn School of Physics, Peking University, Beijing 100871, ChinaPhone: +86 10 62751739, Fax: +86 10 62751615Search for more papers by this authorJun Xu, Jun Xu School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorYan Bo Jin, Yan Bo Jin School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhi Jian Yang, Zhi Jian Yang School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorXiao Dong Hu, Xiao Dong Hu School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhi Xin Qin, Zhi Xin Qin School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhi Zhong Chen, Zhi Zhong Chen School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorXiao Min Ding, Xiao Min Ding School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorYu Zhen Tong, Yu Zhen Tong School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhen Sheng Zhang, Zhen Sheng Zhang School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorGuo Yi Zhang, Guo Yi Zhang School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorDa Peng Yu, Da Peng Yu School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZi Zhao Gan, Zi Zhao Gan School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this author Qian Ren, Qian Ren School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorBei Zhang, Corresponding Author Bei Zhang beiz@water.pku.edu.cn School of Physics, Peking University, Beijing 100871, ChinaPhone: +86 10 62751739, Fax: +86 10 62751615Search for more papers by this authorJun Xu, Jun Xu School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorYan Bo Jin, Yan Bo Jin School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhi Jian Yang, Zhi Jian Yang School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorXiao Dong Hu, Xiao Dong Hu School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhi Xin Qin, Zhi Xin Qin School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhi Zhong Chen, Zhi Zhong Chen School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorXiao Min Ding, Xiao Min Ding School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorYu Zhen Tong, Yu Zhen Tong School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZhen Sheng Zhang, Zhen Sheng Zhang School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorGuo Yi Zhang, Guo Yi Zhang School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorDa Peng Yu, Da Peng Yu School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this authorZi Zhao Gan, Zi Zhao Gan School of Physics, Peking University, Beijing 100871, ChinaSearch for more papers by this author First published: 24 November 2003 https://doi.org/10.1002/pssc.200303482Citations: 8AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Abstract The study of focused Ga ion beam milling for making GaN-based cavity mirrors is presented. The FIB etching rate of GaN was found to be in the rang of 0.6 μm3/nC – 0.43 μm3/nC. Three kinds of mirrors including polishing mirror, tilt mirror and nitride/air distributed Bragg reflection (DBR) mirror were fabricated. In particular, by using the transfer matrix method, the dependences of reflectivity and tolerance on the DBR Bragg order combination, number of DBR pair and nitride fill factor were calculated. To take trade-off between high reflectivity and enough tolerance, the combination of 3rd Bragg order of air gap and 5th Bragg order of semiconductor wall and three pairs were chosen. A deeply etched nitide/air DBR with vertical sidewall was obtained by focused Ga ion beam milling. Negative effects of the FIB on the etched GaN-based mirrors were also noticed. (© 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) Citing Literature Volume0, Issue7Special Issue: 5th International Conference on Nitride Semiconductors (ICNS-5)December 2003Pages 2300-2303 RelatedInformation
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