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Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping

2010; Elsevier BV; Volume: 110; Issue: 9 Linguagem: Inglês

10.1016/j.ultramic.2010.04.008

1879-2723

Cornelia Rodenburg, Mark A. Jepson, Eric Bosch, Maurizio Dapor,

Advanced Electron Microscopy Techniques and Applications

We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling.