Integrated automatic modular measuring system
1988; American Institute of Physics; Volume: 59; Issue: 9 Linguagem: Inglês
10.1063/1.1140028
ISSN1527-2400
AutoresIain D. Baikie, Kees O. van der Werf, L.J. Hanekamp,
Tópico(s)Advancements in Photolithography Techniques
ResumoThis paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand-alone and remote modes and are interconnected using an IEEE-488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.
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