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An image sensor which captures 100 consecutive frames at 1 000 000 frames/s

2003; Institute of Electrical and Electronics Engineers; Volume: 50; Issue: 1 Linguagem: Inglês

10.1109/ted.2002.806474

1557-9646

Takeharu ETOH, Dirk Poggemann, G. Kreider, Hideki Mutoh, Albert Theuwissen, Arno Ruckelshausen, Yasushi Kondo, Hiromasa Maruno, Kenji Takubo, H. Soya, Kohsei Takehara, Tomoo Okinaka, Yasuhide TAKANO,

Image Processing Techniques and Applications

An image sensor for a video camera of 1000000 frames per second (fps) was developed. The specifications of the developed sensor are as follows: 1) frame rate: 1000000 fps; 2) pixel count: 81 120 (=312/spl times/260) pixels; 3) total number of successive frames: 103 frames; 4) gray levels: 10 b; and 5) open area of each pixel (fill factor): 580 square micrometers (13%). The overwriting function is installed for synchronization of image capturing with occurrence of the target event. Sensitivity is significantly high with the large photogate. Some innovative technologies were introduced to achieve ultrahigh performance, including slanted linear CCD in situ storage, curving design procedure, and a CCD switch with fewer metal shunting wires. They are applicable to the development of other new high-performance image sensors.