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Active species downstream of an Ar–O 2 surface-wave microwave discharge for biomedicine, surface treatment and nanostructuring

2011; IOP Publishing; Volume: 20; Issue: 3 Linguagem: Inglês

10.1088/0963-0252/20/3/035006

1361-6595

Kinga Kutasi, Vasco Guerra, Paulo A. Sá,

Molecular Junctions and Nanostructures

Self-consistent theoretical models have been developed in order to investigate the early and remote flowing afterglows of a surface-wave Ar–O2 microwave discharge generated at 2.45 GHz in a 0.5 cm diameter tube at pressures between 1 and 12 mbar. The early afterglow that occurs downstream of the discharge fills up the tube that connects the discharge region with the large-volume processing reactor, where the late afterglow develops. The models provide the time-dependent density profiles of different species along the afterglow and their 3D spatial distribution in the processing reactor. Systematic calculations are performed for all mixture compositions from pure Ar to pure O2 at different pressures.