Dielectric function of nanocrystalline silicon with few nanometers (<3 nm) grain size
2003; American Institute of Physics; Volume: 82; Issue: 18 Linguagem: Inglês
10.1063/1.1569052
ISSN1520-8842
AutoresMaría Losurdo, Maria M. Giangregorio, P. Capezzuto, Giovanni Bruno, M.F. Cerqueira, E. Alves, М. В. Степихова,
Tópico(s)Semiconductor materials and interfaces
ResumoThe dielectric function of nanocrystalline silicon (nc-Si) with crystallite size in the range of 1 to 3 nm has been determined by spectroscopic ellipsometry in the range of 1.5 to 5.5 eV. A Tauc–Lorentz parameterization is used to model the nc-Si optical properties. The nc-Si dielectric function can be used to analyze nondestructively nc-Si thin films where nanocrystallites cannot be detected by x-ray diffraction and Raman spectroscopy.
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