Artigo Revisado por pares

Applications of high‐performance mass spectrometry to the surface analysis of materials

1984; Wiley; Volume: 3; Issue: 4 Linguagem: Inglês

10.1002/mas.1280030404

ISSN

1098-2787

Autores

Dennis Schuetzle, T. L. Riley, J E de Vries, T. J. Prater,

Tópico(s)

Analytical chemistry methods development

Resumo

Mass Spectrometry ReviewsVolume 3, Issue 4 p. 527-585 Article Applications of high-performance mass spectrometry to the surface analysis of materials Dennis Schuetzle, Dennis Schuetzle Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this authorT. L. Riley, T. L. Riley Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this authorJ. E. de Vries, J. E. de Vries Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this authorT. J. Prater, T. J. Prater Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this author Dennis Schuetzle, Dennis Schuetzle Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this authorT. L. Riley, T. L. Riley Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this authorJ. E. de Vries, J. E. de Vries Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this authorT. J. Prater, T. J. Prater Chemical Analysis Research, Research Staff, Ford Motor Company, Dearborn, Michigan 48121Search for more papers by this author First published: Winter 1984 https://doi.org/10.1002/mas.1280030404Citations: 16AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat References 1 McNeal, C. J. Anal. Chem. 1982, 54, 43A–50A. 2 Cameron, D. “Notes on Nomenclature,” Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 901–907. 3 Yin, S.-Y., “ Eighteen Years of SIMS: A Bibliography of SIMS, 1958-1975A.” In: “ Microbeam Analysis”; D. B. Wittry, ed.; San Francisco Press: San Francisco, 1980; pp. 289–309. 4 Yin, S.-Y. “ Recent Developments in Secondary Ion Mass Spectrometry, A Bibliography of SIMS, 1976-1980”; Proc. 16th Ann. Conf. Microbeam Analysis Soc., 1981; pp. 342–378. 5 Turner, N. H.; Colton, R. J. Anal. Chem. 1982, 54, 293R. 6 Blattner, R. J.; Evans, C. A., Jr. Scanning Electron Microsc. 1980, 55, 55–68. 7 Magee, C. W.; Gale, P. J., Bentz, B. L.; Shabanowitz, J., Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 523–524. 8 W. Fite, Extranuclear Laboratories, Pittsburgh, PA; personal communication, 1983. 9 Rawls, R. Chem. Eng. News, October 21, 1982, pp. 24–25. 10 Sigmund, P. Phys. Rev. 1969, 184, 383. 11 Wittmack, K. Surf. Sci. 1979, 89, 668. 12 Sigmund, P., In: “ Inelastic Ion-Surface Collisions”; N. H. Tolk; J. C. Tully; W. Heiland; C. W. White, eds.; Academic: New York, 1977; pp. 121–152. 13 Blaise, G., In: “ Material Characterization Using Ion Beams”; J. P. Thomas; A. Carchard, eds.; Plenum: New York, 1978; pp. 143–238. 14 Winograd, N. Prog. Solid State Chem. 1981, 13, 285. 15 Winograd, N.; Garrison, B. J. Acc. Chem. Res. 1980, 13, 406. 16 Magee, C. W. Int. J. Mass Spectrom. Ion Phys. 1983, 49, 211. 17 Benninghoven, A., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 438–440. 18 Garrison, B. J. J. Am. Chem. Soc. 1980, 102, 6553. 19 Wittmaack, K. Phys. Lett. 1979, 69A, 322. 20 Barber, M.; Bordoli, R. S.; Elliot, G. J.; Sedwick, R. D.; Tyler, A. N. Anal. Chem. 1982, 54, 645A. 21 Arnot, F. L.; Milligan, J. C. Proc. R. Soc. London Ser. A 1936, 156, 538–560. 22 Benninghoven, A.; Loebach, E. Rev. Sci. Instrum. 1971, 42, 49. 23 Benninghoven, A. Z. Phys. 1970, 230, 403. 24 Benninghoven, A. Surf. Sci. 1971, 28, 541. 25 Scheifers, S. M.; Hollar, R. C.; Busch, K. L.; Cooks, R. G. Am. Lab, March 1982, pp. 19–33. 26 Storms, H. A.; Brown, K. F.; Stein, J. D. Anal. Chem. 1977, 49, 2023. 27 McEwen, C. N. Anal. Chem. 1980, 55, 967. 28 Castro, M. E.; Russell, D. H. Anal. Chem. 1984, 56, 578. 29 Onyiruka, E.; White, R. L.; McCrery, D. A.; Gross, M. L.; Wilkins, C. L. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 135. 30 Borchardt, G.; Scherer, H.; Weber, S.; Scherrer, S. Int. J. Mass Spectrom. Ion Phys. 1980, 34, 30. 31 Werner, H. W.; Morgan, A. E. J. Appl. Phys. 1976, 47, 1232. 32 Nakamura, K.; Hirahara, Y.; Shibata, A.; Tamura, H. Mass Spectrosc. 1976, 24, 163. 33 Muller, G. Appl. Phys. 1976, 10, 317. 34 Hunt, C. P.; Stoddart, C. T. H.; Seah, M. P. Surf. Interface Anal. 1981, 3, 157. 35 Nelson, A.; Green, A. K. J. Vacuum Sci. Technol. 1980, 17, 855. 36 Andersen, C. A.; Roden, H. J.; Robinson, C. F. J. Appl. Phys. 1969, 40, 3419. 37 Herzog, R. F. K.; Poschenrieder, W. P.; Rudenauer, F. G.; Satkiewicz, S. Presented at 15th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Denver, May 1967, p. 301. 38 Magee, C. W.; Harrington, W. L. Appl. Phys. Lett. 1978, 33, 193. 39 Slodzian, G. Ann. Phys. 1964, 9, 591. 40 Levi-Setti, R. Ind. Res. Dev., September 1982, p. 124. 41 Barofsky, D. F.; Giessmann, U.; Swanson, L. W.; Bell, A. E. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 495. 42 Mahoney, J. F.; Perel, J.; Forrester, A. T. Appl. Phys. Lett. 1981, 38, 320. 43 Barber, M.; Bordoli, R. S.; Sedgwick, R. D.; Tyler, A. N. Nature 1981, 293, 270. 44 Barber, M.; Bordoli, R. S.; Sedgwick, R. D.; Tyler, A. N. Org. Mass Spectrom. 1981, 293, 256. 45 Barber, M.; Bordoli, R. S.; Elliot, G. J.; Sedgwick, R.; Tyler, A. N. Anal. Chem. 1982, 54, 645A. 46 Mahoney, J. F.; Goebel, D. M.; Perel, J.; Forrester, A. T. Biomed. Mass Spectrom., 1982, 10, 61. 47 Williams, P.; Adams, D., Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 53–54. 48 Benninghoven, A. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 459. 49 Hillenkamp, F. Appl. Phys. 1975, 8, 341. 50 Kaufmann, R.; Hillenkamp, F. Ind. Res. Dev., April 1979, pp. 145–152. 51 Hillenkamp, F.; Kaufmann, R. Z. Anal. Chem. 1981, 308, 193. 52 Schuewler, B.; Nitsche, R.; Hillenkamp, F. Scanning Electron Microsc. 1982, 2, 597. 53 Simons, D. S., Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 901–907. 54 Furman, B. K.; Evans, C. A., Jr. In: “ Secondary Ion Mass Spectrometry SIMS II”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 88–93. 55 Feigl, P.; Schueler, B.; Hillenkamp, F. Int. J. Mass Spectrom. Ion Phys. 1983, 47, 15. 56 Posthumus, M. A.; Kistemaker, P. G.; Meuzelaar, H. L. C. Anal. Chem. 1978, 50, 985–991. 57 Kistemaker, P. G.; Lens, M. M. J.; Van der Peyl, G. J. Q.; Boerboom, A. J. H. Adv. Mass Spectrom. 1979, 8A, 928–991. 58 Cody, R. B.; Burnier, R. C.; Reents, W. D., Jr.; Carlin, T. J.; McCrery, D. A.; Lengal, R. K.; Freiser, B. S. Int. J. Mass Spectrom. Ion Phys. 1980, 33, 37. 59 Cody, R. B.; Burnier, R. C.; Freiser, B. S. Anal. Chem. 1982, 54, 96–101. 60 Ledford, E. B., Jr.; Ghaderi, S.; White, R. L.; Spencer, R. B.; Kulkarni, P. S.; Wilkins, C. L.; Gross, M. L. Anal. Chem. 1980, 52, 463. 61 Ledford, E. B., Jr.; White, R. L.; Ghaderi, S.; Wilkins, C. L.; Gross, M. L. Anal. Chem. 1980, 52, 2450. 62 McCrery, D. A.; Ledford, E. B., Jr.; Gross, M. L. Anal. Chem. 1982, 54, 1435. 63 Macfarlane, R. D.; Togerson, D. F. Int. J. Mass Spectrom. Ion Phys. 1976, 21, 81. 64 Macfarlane, R. D.; Uemura, D.; Ueda, K.; Hirata, Y. J. Am. Chem. Soc. 1980, 102, 875. 65 McNeal, C. J.; Macfarlane, R. D. J. Am. Chem. Soc. 1981, 103, 1609. 66 Macfarlane, R. D.; McNeal, C. J.; Hunt, J. E. Adv. Mass Spectrom. 1980, 8A, 349. 67 Chait, B. T.; Agosta, W. C.; Field, F. H. Int. J. Mass Spectrom. Ion. Phys. 1981, 39, 339. 68 Danigel, H.; Macfarlane, R. D. Int. J. Mass Spectrom. Ion Phys. 1981, 39, 157. 69 Posthumus, M. A.; Kistemaker, P. G.; Meuzelaar, H. L. C. Anal. Chem. 1978, 50, 985. 70 Oechsner, H.; Ruhe, W.; Stumpe, E. Surf. Sci. 1979, 85, 289. 71 Lundquist, T. R. J. Vacuum Sci. Technol. 1978, 15, 684. 72 Kloppel, K. D.; Seidel, W. Int. J. Mass Spectrom. Ion Phys. 1979, 31, 151. 73 Kloppel, K. D.; von Bunau, G. Int. J. Mass Spectrom. Ion Phys. 1981, 39, 85. 74 Holland, S. P.; Garrison, B. J.; Winograd, N., Phys. Rev. Lett. 1980, 44, 756. 75 Warmoltz, N.; Werner, H. W.; Morgan, A. E. Surf. Interface Anal. 1980, 2, 46. 76 Morrison, G. H.; Slodzian, G. Anal. Chem. 1975, 47, 933A. 77 Slodzian, G., In: “ Applied Charged Particle Optics, Part B”; A. Septier, ed.; Academic: New York, 1980; pp. 1–44. 78 Rudenauer, F. G.; Pollinger, P.; Studnicka, H.; Gnaser, H.; Steiger, W.; Higatsberger, M. J., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 43–48. 79 Liebl, H. Adv. Mass Spectrom. 1978, 7A, 807. 80 Gries, W. H.; Rudenauer, F. G. Int. J. Mass Spectrom. Ion Phys. 1975, 18, 111. 81 Liebl, H. Anal. Chem. 1974, 46, 22A. 82 Reed, J. B. Scanning 1980, 3, 119. 83 Schilling, J. H.; Buger, P. A. Int. J. Mass Spectrom. Ion Phys. 1978, 27, 283. 84 Williams, P.; Evans, C. A., Jr.; Grosbeck, M. L.; Birnbaum, H. Anal. Chem. 1976, 48, 964. 85 Wittmacck, K. Scanning 1980, 3, 133. 86 Leta, D. P.; Morrison, G. H. Anal. Chem. 1980, 52, 277. 87 Blattner, R. J.; Baker, J. A.; Evans, C. A., Jr. Anal. Chem. 1974, 46, 2171. 88 Wittmaack, K.; Maul, J.; Shulz, F. Int. J. Mass Spectrom. Ion Phys. 1973, 11, 23. 89 Wittmaack, K. Vacuum 1982, 32, 65. 90 Kloppel, K. D.; Seidel, W. Springer Ser. Chem. Phys. 1979, 9, 212. 91 Kloppel, K. D.; Seidel, W. Int. J. Mass Spectrom. Ion Phys. 1979, 31, 151. 92 Dawson, P. H. Int. J. Mass Spectrom. Ion Phys. 1975, 17, 447. 93 Dawson, P. H.; Redhead, P. A. Rev. Sci. Instrum. 1977, 48, 159. 94 Wittmaack, K. “ High Resolution Secondary Ion Mass Spectrometry with Quadrupole Mass Filters”; Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. Solid Surfaces, Vienna, 1977. 95 Liebl, H. J. Appl. Phys. 1967, 38, 5277. 96 Castaing, R.; Slodzian, G. J. Microsc. 1961, 1, 395. 97 Williams, P.; Evans, C. A., Jr. “ High Resolution Secondary Ion Mass Spectrometry.” In: “ Secondary Ion Mass Spectrometry”; K. F. J. Heinrich; D. E. Newbury, eds.; NBS Sp. Publ. 427, U. S. GPO: Washington, DC, 1975; pp. 63–68. 98 Campana, J. E.; Barlak, T. M.; Wyatt, J. R.; deCorpo, J. J.; Colton, R. J. J. Vacuum Sci. Technol. 1982, 20, 1068. 99 Kondrat, R. W.; Cooks, R. G. Anal. Chem. 1978, 50, 81A. 100 McLafferty, F. W. Science 1981, 214, 280. 101 Tomer, K. B.; Crow, F. W.; Gross, M. L. Int. J. Mass. Spectrom. Ion Phys. 1983, 46, 375. 102 Glish, G. L.; Todd, P. J., Presented at 29th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Minneapolis, MN, 1981; book of abstracts, pp. 675–676. 103 Hunt, D. F.; Bone, W. M.; Shabanowitz, J.; Rhodes, J.; Ballard, J. M. Anal. Chem. 1981, 53, 1704. 104 Lyon, P. A.; Stebbings, W. L.; Crow, F. W.; Tomer, K. B.; Lippstreu, D. L.; Gross, M. L. Anal. Chem. 1984, 56, 8. 105 Schuetzle, D.; Riley, T.; Hampton, C. V. “Direct Analysis of Additives in Prepolymers Using MS/MS in SIMS Analysis”; J. Trace Microprobe Techniques, submitted 1984. 106 Schuetzle, D.; Riley, T.; Harvey, T. M.; Prater, T. J.; Hunt, D. Anal. Chem. 1982, 53, 265. 107 Purser, K. H.; Litherland, A. E.; Rucklidge, J. C. Surf. Interface Anal. 1979, 1, 12. 108 Wilkins, C. L.; Gross, M. L. Anal. Chem. 1981, 53, 1661A. 109 Lui, L. K.; Unger, S. E.; Cooks, R. G. Tetrahedron 1981, 37, 1067. 110 Unger, S. E.; Day, R. J.; Cooks, R. G. Int. J. Mass Spectrom. Ion Phys. 1981, 39, 231. 111 Williams, P., Surf. Sci. 1979, 90, 588. 112 Storms, H. A.; Brown, K. F.; Stein, H. D. Anal. Chem. 1977, 49, 2023. 113 Kurz, E. A. Am. Lab., March 1979, p. 67. 114 Catchpole, C. E. “ Photoelectronic Imaging Devices-Volume 2. Devices and Their Evaluation”; L. M. Biberman; S. Nudelman, eds.; Plenum: New York, 1971; pp. 167–190. 115 Staudenmaier, G.; Hofer, W. O.; Liebl, H. Int. J. Mass Spectrom. Ion Phys. 1976, 11, 103. 116 Wiza, J. L. Nucl. Instrum. Methods 1979, 162, 587. 117 Fassett, J. D.; Rother, J. R.; Morrison, G. H. Anal. Chem. 1977, 49, 2322. 118 Furman, B. K.; Morrison, G. H. Anal. Chem. 1980, 52, 2305. 119 Kowalski, B. R. Anal. Chem. 1975, 47, 1152A. 120 Cherepin, V. T.; Kosyachkov, A. A.; Gudzenko, G. I. Int. J. Mass Spectrom. Ion Phys. 1980, 35, 225. 121 Antal, J.; Kugler, S.; Riedel, M. In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 297–300. 122 Steiger, W.; Rudenauer, F. G.; Antal, J.; Kugler, S. Vacuum 1983, 33, 321. 123 Reed, S. J. B. Scanning 1980, 3, 119. 124 Reed, S. J. B.; Long, J. V. P.; Coles, J. N.; Astill, D. M. Int. J. Mass Spectrom. Ion Phys. 1976, 22, 333. 125 Dawson, P. H.; Redhead, P. A. Rev. Sci. Instrum. 1977, 48, 159. 126 Schuetzle, D. Biomed. Mass Spectrom. 1975, 2, 228. 127 Benninghoven, A. Personal communication, University of Munster, Munster, Germany, 1983. 128 Schuetzle, D.; Prater, T. J.; Hagge, D. E., Presented at 22nd Ann. Conf. Soc. Mass Spectrom. Allied Topics, Houston, TX, 1975; book of abstracts, pp. 208–211. 129 Cherepin, V. T.; Kosyachkov, A. K.; Krasyuk, A. D.; Vasiliev, M. A., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Reidel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 223–256. 130 Zinner, E. Scanning 1980, 3, 57. 131 Coburn, J. W. J. Vacuum Sci. Technol. 1976, 13, 1037. 132 Morrison, G. H., In: “ Characterization of Metal and Polymer Surfaces”; L.-H. Lee, ed.; Academic: San Francisco, 1977; Vol. 1, p. 351. 133 Stewart, I. M., In: “ Characterization of Metal and Polymer Surfaces”; L.-H. Lee, ed.; Academic: San Francisco, 1977; Vol. 1, p. 367. 134 Patkin, A. J.; Morrison, G. H. Anal. Chem. 1982, 54, 2. 135 Liebl, H. Scanning 1980, 3, 79. 136 Campana, J. E.; deCorpo, J. J.; Wyatt, J. R. Rev. Sci. Instrum. 1981, 52, 1517. 137 Liebl, H. In: “ Low Energy Ion Beams 1977”; Conference Series No. 38; Stephens, K. G.; Wilson, I. H.; Moruzzi, J. L., eds.; Bristol: The Institute of Physics, 1978; pp. 266–281. 138 Van Deginste, B. G. M.; Kowalski, B. R. Anal. Chem. 1983, 55, 557. 139 Rosenfeld, A.; Kak, A., “ Digital Image Processing”; Academic: New York, 1976. 140 Gonzales, R. C.; Wintz, P., “ Digital Image Processing”; Addison-Wesley: Reading, MA, 1977. 141 Pratt, W. K. “ Digital Image Processing”; Wiley: New York, 1978. 142 Fassett, J. D.; Drummer, D. M.; Morrison, G. H. Anal. Chim. Acta 1979, 112, 165. 143 Schwartz, A. A.; Soha, J. M. Appl. Opt. 1977, 16, 1979. 144 Robinson, G. S. Comp. Graph. Image Proc. 1977, 6, 492. 145 Kaberline, S.; Prater, T.; Schuetzle, D.; Feldkamp, L. A.; Kress, J.; deVries, J. “ Three Dimensional Image Processing of Ion Microscope Information Stored on VCR Tape Format”; Surf. Interface Anal., submitted 1984. 146 Morrison, G. H., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 244–256. 147 Werner, H. W. Surf. Interface Anal. 1980, 2, 56. 148 Newbury, D. E. Scanning 1980, 3, 110. 149 Scilla, G. J.; Morrison, G. H. Anal. Chem. 1977, 49, 1529. 150 Drummer, D. M.; Morrison, G. H. Anal. Chem. 1980, 52, 2147. 151 Ganjei, J. D.; Leta, D. P.; Morrison, G. H. Anal. Chem. 1978, 50, 285. 152 Ganjei, J. D.; Morrison, G. H. Anal. Chem. 1978, 50, 2034. 153 Christie, W. H.; Eby, R. E.; Anderson, R. L.; Kollie, T. G. Appl. Surf. Sci., 1979, 3, 329. 154 Andersen, C. A.; Hinthorne, J. R. Anal. Chem. 1973, 45, 1421. 155 Schilling, J. H.; Buger, P. A. Int. J. Mass Spectrom. Ion Phys. 1978, 27, 283. 156 Sparrow, G. R., Presented at 24th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Washington, DC, 1976; book of abstracts, pp. 299–304. 157 Morgan, A. E.; Werner, H. W. Anal. Chem. 1977, 49, 927. 158 Wilson, R. G.; Brewer, G. R., “ Ion Beams with Applications to Ion Implantation”; Wiley: New York, 1973. 159 Gries, W. H. Int. J. Mass Spectrom. Ion Phys. 1979, 30, 97. 160 Schilla, G. H.; Morrison, G. H. Anal. Chem. 1977, 49, 1529. 161 Leta, D. P.; Morrison, G. H. Anal. Chem. 1980, 52, 277. 162 Leta, D. P.; Morrison, G. H. Anal. Chem. 1980, 52, 514. 163 Jurella, Z., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 257–263. 164 Fleming, R. F. U. S. National Bureau of Standards, Washington, DC, personal communication, 1983. 165 Shepard, F. R.; Robinson, W. H.; Brown, J. D.; Phillips, B. F. J. Vacuum Sci. Technol. 1983, 20, 991–994. 166 Grasserbauer, M.; Stingeder, G.; Guerrero, E.; Potzl, H.; Tiebert, R.; Ryssel, H., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 321–329. 167 Magee, C. W.; Bean, J. C.; Foti, G.; Poate, J. M. Thin Solid Films 1981, 81, 1. 168 Magee, C. W.; Honig, R. E.; Evans, C. A., Jr. In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 172–185. 169 Clegg, J. B., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 308–313. 170 Magee, C. W. J Electrochem. Soc. 1979, 126, 660. 171 Werner, H. W. Acta Electron. 1976, 19, 53. 172 Magee, C. W.; Harrington, W. L.; Honig, R. E. Rev. Sci. Instrum. 1978, 49, 477. 173 Karasek, F. W. Ind. Res. Dev. 1974, 25, 42. 174 Benninghoven, A.; Jaspers, D.; Sichtermann, W. Appl. Phys. 1976, 11, 35. 175 Benninghoven, A.; Sichtermann, W. Org. Mass Spectrom. 1977, 12, 595. 176 Benninghoven, A. Proc. 2nd Int. Workshop on Ion Formation from Organic Solids (IFOS II), September 7-9, 1982. 177 Grade, H.; Winograd, N.; Cooks, R. G. J. Am. Chem. Soc. 1977, 99, 7725. 178 Colton, R. J. J. Vacuum Sci. Technol. 1981, 18, 737. 179 Werner, H. W. Microchim. Acta. Suppl. 1977, VII, 63. 180 Muller, G. Appl. Phys. 1976, 10, 317. 181 Prager, M. Appl. Phys. 1976, 8, 361. 182 Tantsyrev, G. D.; Kleimenov, N. A. Dokl. Akad. Nauk SSR 1973, 213, 649. 183 Gardella, J. A., Jr.; Hercules, D. M. Anal. Chem. 1980, 52, 226. 184 Gardella, J. A., Jr.; Hercules, D. M. Anal. Chem. 1981, 53, 1879. 185 Campana, J. E.; deCorpo, J. J.; Colton, R. J. Appl. Surf. Sci. 1981, 8, 337. 186 Briggs, D. Surf. Interface Anal. 1982, 4, 151. 187 Briggs, D.; Wootton, A. B. Surf. Interface Anal. 1982, 4, 109. 188 Rabalais, J. W. “ Photon, Electron and Ion Probes of Polymer Structure and Properties”; D. W. Dwight; T. J. Fabish; H. R. Thomas, eds.; ACS Symp. Ser. 162; Am. Chem. Soc.: Washington, DC, 1981. 189 Chang, T. T., Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 318–320. 190 Lattimer, R. P.; Pausch, J. B., Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 393–394. 191 Day, R. J.; Unger, S. E.; Cooks, R. G. Anal. Chem. 1980, 52, 557A. 192 Campana, J. E.; Rose, S. L. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 483. 193 Harrington, W. L.; Bentz, B. L.; Gale, P. J.; Magee, C. W., Presented at 30th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Honolulu, HI, 1982; book of abstracts, pp. 386–387. 194 Gillberg, G.; Kemp, D. J. Appl. Polym. Sci. 1981, 26, 2023. 195 Gardella, J. A.; Hercules, D. M. Spectrosc. Lett. 1980, 13, 347. 196 Wubken, G.; Thienel, P.; Suchanek, H. J.; Berndtsen, N.; Kruger, R., Presented at Kunststofftechnisches Kolloquium des IKV, Aachen, Germany, March 8-10, 1978. 197 Riley, T. L.; Prater, T. J.; deVries, J.; Gerlock, J.; Schuetzle, D., Presented at 31st Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Boston, MA, 1983; book of abstracts, Anal. Chem., 1984, 56. 198 Briggs, D. Surf. Interface Anal. 1983, 5, 113. 199 deVries, J.; Holubka, J.; Prater, T. J.; Kaberline, S.; Schuetzle, D.; McIntyre, N. S.; Chauvin, W. “ Spatial Chemical Analysis of Polymer Laminates and Conducting Polymer Films Using SIMS”; Surf. Interface Anal., submitted 1984. 200 Helms, C. R. J. Vacuum Sci. Technol. 1982, 20, 948. 201 Ryan, M. A.; McGuire, G. E., In: “ Industrial Applications of Surface Analysis”; L. A. Casper; C. J. Powell, eds.; ACS Symp. Ser. 199; Am. Chem. Soc.: Washington, DC, 1982; pp. 228–248. 202 Taya, S.; Suzuki, M.; Tsuyama, H.; Kanomata, I. Int. J. Mass Spectrom. 1978, 27, 63. 203 Grunthaner, F. J.; Maserjian, J., “ Physics of SiO2 and Its Interfaces”; S. Pantelides, ed.; Pergamon: New York, 1978; pp. 389–395. 204 Magee, C. W.; Harrington, W. L., Appl. Phys. Lett. 1978, 33, 193. 205 Schwarz, S. A.; Barton, R. W.; Ho, C. P.; Helms, C. R. J. Electrochem. Soc. 1981, 128, 1101. 206 Johnson, N. M.; Biegelsen, D. K.; Mayer, M. D.; Deline, V. R.; Evans, C. A., Jr. Appl. Phys. Lett. 1981, 38, 995. 207 Klaus, N.; Baranow, I. L. Vacuum 1982, 32, 319. 208 Coleman, D. J., Jr.; Shaw, D. W.; Dobrott, R. D. J. Electrochem. Soc. 1977, 124, 239. 209 Koshiga, F.; Sugano, T. Thin Solid Films 1979, 56, 39. 210 Wittmaack, K. Surf. Sci. 1979, 68, 118. 211 Katz, W.; Smith, G.; Aina, O.; Baliga, B. J. Appl. Surf. Sci. 1981, 9, 122. 212 Kaiser, U.; Ganshcow, O.; Wiedmann, L.; Benninghoven, A. J. Vacuum Sci. Technol. 1983, A1, 657. 213 Crowder, B. L.; Zirinsky, S. IEEE J. Solid State Circuits 1979, SC-14, 291. 214 Wang, K. L. J. Vacuum Sci. Technol. 1979, 6, 130. 215 Wang, K. L.; Storms, H. A., In: “ Secondary Ion Mass Spectrometry SIMS II”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 110–113. 216 Chang, K. Y.; Pancholy, R. K. Appl. Surf. Sci. 1981, 9, 377. 217 Zinner, E. J. Electrochem. Soc. 1983, 130, 199C. 218 Hoffmann, G.; Romanova, G. F.; Nemeth-Sallay, M.; Marchenko, R. J.; Didenko, P. J. J. Phys. D 1983, 16, 59. 219 Oshima, M.; Kawashima, I.; Yoshii, S. Proc. 11th Conf. on Solid State Devices, Toyko, 1979; Jpn. J. Appl. Phys. 1980, 19, 501. 220 Stingeder, G.; Grasserbauer, M.; Guerrero, E.; Potzl, H.; Tiebert, R. Fresenius Z. Anal. Chem. 1983, 314, 304. 221 Phillips, B. F. J. Vacuum Sci. Technol. 1982, 20, 793. 222 Liu, S. G.; Douglas, E. C.; Wu, C. P.; Magee, C. W.; Narayan, S. Y.; Jolly, S. T.; Kolondra, F.; Jain, S. RCA Rev. 1980, 41, 227. 223 Lidow, A.; Gibbons, J. F.; Deline, V. R.; Evans, C. A., Jr., Appl. Phys. Lett. 1978, 32, 15. 224 White, C. W.; Christie, W. H. Solid State Technol. 1980, 23, 109. 225 Huber, A. M.; Morillot, G.; Merenda, P.; Bonnet, M.; Bessonneau, G., In: “ Secondary Ion Mass Spectrometry SIMS III”; A. Benninghoven; J. Giber; J. Laszio; M. Riedel; H. W. Werner, eds.; Springer-Verlag: Berlin, 1982; Vol. 19, pp. 314–320. 226 Sparrow, G. R. Scanning Electron Microsc. 1978, 1, 71. 227 Holland, R.; Blackmore, G. W. Surf. Interface Anal. 1982, 4, 174. 228 Nitz, H. M.; Ganschow, O.; Kaiser, U.; Wiedmann, L.; Benninghoven, A. Surf. Sci. 1981, 104, 365. 229 Wittmaack, K. Adv. Mass Spectrom. 1980, 8A, 503. 230 Holland, R.; Blackmore, G. W. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 527. 231 Tsong, I. S. I.; Monkowski, J. R.; Hoffman, D. W. Nucl. Instrum. Methods 1981, 182/183, 237. 232 Magee, C. W.; Honig, R. E. Surf. Interface Anal. 1982, 4, 35. 233 Degreve, F., Ged, P. Surf. Interface Anal. 1983, 5, 2. 234 Humpherys, T. W.; Lusk, R. L.; Jungling, K. C., NBS Sp. Publ. 1980, No. 568, 257. 235 Dibennedetto, A. T.; Scola, D. A. J. Colloid Interface Sci. 1978, 64, 480. 236 Gettings, M.; Kinloch, A. J. Surf. Interface Anal. 1979, 1, 209. 237 deVries, J. E.; Riley, T. L.; Holubka, J. W.; Dickie, R. A. “ Surface Studies of Conversion Coated Steel after Corrosion Induced Paint Deadhesion”; Surf. Interface Anal. 1984, accepted. 238 Werner, H. W. Surf. Interface Anal. 1980, 2, 56. 239 Morgan, A. E. Surf. Interface Anal. 1980, 2, 123. 240 Jurela, Z. Int. J. Mass Spectrom. Ion Phys. 1981, 37, 67. 241 Tjong, S. C. Appl. Surf. Sci. 1981, 9, 92. 242 Toyokawa, F.; Furuya, K.; Kikuchi, T. Surf. Sci. 1981, 110, 329. 243 Textor, M. Proc. Third Int. Conf. 2nd Ion Mass Spectrom. 1982, p. 372. 244 Csanady, A.; Marton, D.; Geleji-Neubauer, I.; Hofmann, S. Corrosion Sci. 1982, 22, 689. 245 Benninghoven, A.; Muller, A. Phys. Rev. Lett. 1972, 40, 169. 246 Conner, G. R. J. Vacuum Sci. Technol. 1978, 15, 343. 247 Conner, G. R., Thin Solid Films 1978, 53, 38. 248 Christie, W. H.; Eby, R. E.; Bittner, H. F.; Bell, J. T.; Redman, J. D. Appl. Surf. Sci. 1982, 13, 414. 249 Hoflund, G. B.; Cox, D. F.; Ohuchi, F.; Holloway, P. H.; Laitinen, H. A. Appl. Surf. Sci. 1982, 14, 281. 250 Metson, J. B.; Bancroft, G. M.; McIntyre, N. S.; Chauvin, W. J. Surf. Interface Anal. 1983, 5, 181. 251 Barber, M.; Vickerman, J. C.; Westenhome, J. J. Catalysis 1976, 42, 48. 252 Dawson, P. H. J. Vacuum Sci. Technol. 1977, 14, 786. 253 Colton, R. J.; Murday, J.; Wyatt, J. R.; deCorpo, J. J., Presented at 25th Ann. Conf. Am. Soc. Mass Spectrom. Allied Topics, Washington, DC, 1977; book of abstracts, pp. 322–325. 254 Grade, H.; Cooks, R. G. J. Am. Chem. Soc. 1978, 100, 5615. 255 Baun, W. L. Appl. Surf. Sci. 1977, 1, 81. 256 Baun, W. L. “ Applications of Ion Beam Methods to Characterization of Adhesive Bonding Materials”; ACS Symp. Ser. No. 199; Am. Chem. Soc.: Washington, DC, 1982; pp. 121–141. 257 Baun, W. L. Surf. Technol. 1980, 11, 385. 258 Benninghoven, A.; Sichtermann, W. Org. Mass Spectrom. 1977, 12, 595. 259 Gossink, R. G.; deGrefte, H. A. M.; Werner, H. W., J. Am. Ceram. Soc. 1979, 62, 4. 260 Smets, B. M. J.; Gossink, R. G. Fresenius Z. Anal. Chem. 1983, 314, 285. 261 Clark, D. E.; Pantano, C. G., Jr.; Hench, L. L., “ Corrosion of Glass”; New York: Books for Industry, 1979. 262 Malm, D. L.; Tasker, G. W., In: “ Secondary Ion Mass Spectrometry, SIMS II”; A. Benninghoven; C. A. Evans; R. A. Powell; R. Shimizu; H. A. Storms, eds.; Springer-Verlag: Berlin, 1979; Vol. 19, pp. 107–109. 263 Malm, D. L.; Vasile, M. J.; Padden, F. J.; Dove, D. B.; Pantano, C. G., Jr. J. Vacuum Sci. Technol. 1978, 15, 35. 264 Malm, D. L.; Riley, J. E., Jr. J. Electrochem. Soc. 1982, 129, 1819. 265 McIntyre, N. S.; Strathdee, G. G.; Phillips, B. F. Surf. Sci. 1980, 100, 71. 266 Wakefield, C. J.; Hazelby, D., Taylor, L. C. E.; Evans, S. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 491. 267 Borchardt, G.; Scherrer, H.; Weber, S.; Scherrer, S. Int. J. Mass Spectrom. Ion Phys. 1980, 34, 361. 268 Borchardt, G.; Franek, H. J.; Scherrer, H.; Scherrer, S.; Weber, S. Int. J. Mass Spectrom. Ion Phys. 1983, 46, 507. 269 Surman, D. J.; Vickerman, J. C. Appl. Surf. Sci. 1981, 9, 108. 270 Smith, G.; Pantano, C. G., Jr. Appl. Surf. Sci. 1981, 9, 345. 271 McIntyre, N. S., Personal communication, 1983. 272 McIntyre, N. S.; Johnston, D.; Chauvin, W. J.; Nietering, K.; Schuetzle, D.; Shankar, K.; MacDonald, J. Nucl. Instrum. Methods B 1984, submitted. 273 Knapp, D. R., “ Handbook of Analytical Derivatization Reactions”, Wiley: New York, 1979. 274 K. Blau; G. S. King, eds. “ Handbook of Derivatives for Chromatography”; Heyden: New York, 1977. 275 Dickie, R. A.; Hammond, J. S.; deVries, J. E.; Holubka, J. W. Anal. Chem. 1982, 54, 2045. Citing Literature Volume3, Issue4Winter 1984Pages 527-585 ReferencesRelatedInformation

Referência(s)
Altmetric
PlumX