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Electrically programmable fuse (eFUSE) using electromigration in silicides

2002; Institute of Electrical and Electronics Engineers; Volume: 23; Issue: 9 Linguagem: Inglês

10.1109/led.2002.802657

1558-0563

C. Kothandaraman, S.K. Iyer, Shankar S. Iyer,

Molecular Junctions and Nanostructures

For the first time we describe a positive application of electromigration, as an electrically programmable fuse device (eFUSE). Upon programming, eFUSE's show a large increase in resistance that enable easy sensing. The transient device characteristics show that the eFUSE stays in a low resistance state during programming due to the local heating of the fuse link. The programming is enhanced by a device design that uses a large cathode which increases the temperature gradient and minimizes the effect of microstructural variations.