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Low-voltage large-value tunable capacitors using selfaligned HARPSS

2008; Institute of Electrical and Electronics Engineers; Linguagem: Inglês

10.1109/memsys.2008.4443657

1084-6999

Mina Rais‐Zadeh, Ashwin K. Samarao, P. Monajemi, Farrokh Ayazi,

Mechanical and Optical Resonators

This paper presents a silicon microfabrication technique for the implementation of large-value one-port and two-port tunable capacitors with very small tuning voltages. The proposed process offers very high aspect- ratio narrow vertical gaps of different sizes in a self- aligned manner, allowing the realization of in-plane tunable capacitors in a small area. A continuous tuning of 240% is achieved for a 15 pF two-port capacitor with the application of 3.5 V. A 106 pF one-port capacitor occupies an area of 8 mm 2 and is tuned to 130 pF with a tuning voltage of 0.9 V.