A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators
2009; IEEE Photonics Society; Volume: 15; Issue: 5 Linguagem: Inglês
10.1109/jstqe.2009.2022959
ISSN1558-4542
AutoresChengkuo Lee, Fu‐Li Hsiao, Takeshi Kobayashi, Kah How Koh, P.V. Ramana, Wenfeng Xiang, Bin Yang, Chee Wei Tan, D. Pinjala,
Tópico(s)Mechanical and Optical Resonators
ResumoA rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
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