Portal de Periódicos da CAPES

IC-integrated flexible shear-stress sensor skin

2003; Institute of Electrical and Electronics Engineers; Volume: 12; Issue: 5 Linguagem: Inglês

10.1109/jmems.2003.815831

1941-0158

Yong Ping Xu, Yu‐Chong Tai, Allen Huang, Chih‐Ming Ho,

Plasma Diagnostics and Applications

This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 μm thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a semicylindrical aluminum block and testing it in a subsonic wind tunnel. In our experiment, the sensor skin has successfully identified both the leading-edge flow separation and stagnation points with the on-skin circuitry. The integration of IC with MEMS sensor skin has significantly simplified implementation procedures and improved system reliability.