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DC Plasma Nitridation of Thin Aluminium Films

1984; Wiley; Volume: 85; Issue: 1 Linguagem: Inglês

10.1002/pssa.2210850141

1521-396X

T. Jung, L. Roth,

GaN-based semiconductor devices and materials

physica status solidi (a)Volume 85, Issue 1 p. K15-K18 Short Note DC Plasma Nitridation of Thin Aluminium Films T. Jung, T. Jung Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this authorL. Roth, L. Roth Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this author T. Jung, T. Jung Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this authorL. Roth, L. Roth Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this author First published: 16 September 1984 https://doi.org/10.1002/pssa.2210850141Citations: 2 Rudower Chaussee 5, DDR-1199 Berlin, GDR. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat References 1 T. Sugano, F. Koshiga, K. Yamasaki, Q. V. Ho, and Y. Hirayama, J. Fac. Engineering, Univ. Tokyo (B), XXXV, 553 (1980). 2 A. K. Ray, and A. Reisman, J. Electrochem. Soc. 128, 2460, 2466 (1981). 3 L. J. Miles, and P. H. Smith, J. Electrochem. Soc. 110, 1240 (1963). 4 R. P. H. Chang, Thin Solid Films 56, 89 (1979). 5 R. P. H. Chang, C. C. Chang, and S. Darak, Appl. Phys. Letters 36, 999 (1980). 6 J. I. Pankove, J. E. Berkeyheiser, S. J. Kilpatrick, and C. W. Mages, J. electronic Mater. 12, 359 (1983). 7 L. Láska, and J. Kodymová, Czech. J. Phys. B27, 1219 (1977). 8 A. G. Schrott, and S. C. Fain Jr., Surface Sci. 123, 204 (1982). 9 A. S. Korhonen, E. H. Sirvio, and M. S. Sulonen, Thin Solid Films 107, 387 (1983). 10 L. E. Davis, N. C. Macdonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, Handbook of Auger Electron Spectroscopy, 2nd ed., Physical Electronics Industries, 1976. Citing Literature Volume85, Issue116 September 1984Pages K15-K18 ReferencesRelatedInformation