Portal de Periódicos da CAPES

Enabling high-data-rate imaging applications with Grating Light Valve technology

2004; SPIE; Volume: 5348; Linguagem: Inglês

10.1117/12.525886

1996-756X

Alexander Payne, Wilhelmus DeGroot, Robert J. Monteverde, D. T. Amm,

Advancements in Photolithography Techniques

The Grating Light Valve diffractive MOEMS device has been successfully used in imaging applications (lithography and display) requiring image data-rates of 1-5 giga-bits per second (Gb/s). However, new applications such as maskless photolithography and high performance displays require larger pixel counts and finer control of gray-scale. This paper discusses the suitability of the GLV device for high data-rate applications. It discusses the factors governing GLV device switching speed and illustrates how these properties are optimized relative to other requirements of the imaging system.