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Single-shot depth-section imaging through chromatic slit-scan confocal microscopy

1998; Optica Publishing Group; Volume: 37; Issue: 28 Linguagem: Inglês

10.1364/ao.37.006764

0003-6935

Paul C. Lin, Pang-Chen Sun, Lijun Zhu, Yeshaiahu Fainman,

Optical measurement and interference techniques

A chromatic confocal microscope constructed with a white-light source in combination with a diffractive lens provides wavelength-to-depth coding for profile measurements of a three-dimensional sample. We acquired depth-section images nonmechanically and in parallel by incorporating a slit-scan confocal technique into the system. A system using a 100× objective obtained a depth resolution of 0.023 μm comparable with surface profilometers that operate using conventional confocal microscopy. Experimental measurements of a four-phase-level diffractive element and of a machined, metal bearing are presented.