Change of growth orientation in Pt films epitaxially grown on MgO(001) substrates by sputtering
2002; Springer Nature; Volume: 17; Issue: 9 Linguagem: Inglês
10.1557/jmr.2002.0342
ISSN2044-5326
AutoresKun Ho Ahn, Sunggi Baik, Sang Sub Kim,
Tópico(s)Copper Interconnects and Reliability
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