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Improved Light Output of Photonic Crystal Light-Emitting Diode Fabricated by Anodized Aluminum Oxide Nano-Patterns

2008; Institute of Electrical and Electronics Engineers; Volume: 20; Issue: 4 Linguagem: Inglês

10.1109/lpt.2007.915617

1941-0174

Joonmo Park, Jin‐Kyoung Oh, Kwang‐Woo Kwon, Young‐Ho Kim, Sung-Soo Jo, Jun Key Lee, Sang‐Wan Ryu,

Photonic Crystals and Applications

A photonic crystal (PC) light-emitting diode (LED) was fabricated using an anodized aluminum oxide (AAO) nano-pattern technique, which has potential applications to mass production. The AAO nano-pattern, which was anodized in 0.3-M oxalic acid at 70 V, was transferred to the n-GaN bottom cladding through reactive ion etching and covered during the regrowth of GaN to form periodic air holes. The PC was embedded into the bottom cladding, which resulted in a low operating voltage. For the PC LED, the light output was enhanced by more than 20%, while the operating voltage increased only slightly. The radiation pattern of the PC LED showed two lobes at approximately plusmn30deg, which originated from the diffraction by PC.