On the determination of the sp3 to sp2 ratio in diamond-like carbon thin films
1997; Elsevier BV; Volume: 302; Issue: 1-2 Linguagem: Inglês
10.1016/s0040-6090(96)09519-3
ISSN1879-2731
AutoresSomna S. Mahajan, Harish C. Barshilia, B. R. Mehta, V. D. Vankar,
Tópico(s)Metal and Thin Film Mechanics
ResumoThe carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the e2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of sp3- and sp2-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp2-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed e2, spectra in the low energy range (< 4 eV). The atomic fraction of sp3-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.
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